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Name: XYZ Theta Gantry with Planar Air Bearing
Brand: W-ROBOT

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XYZ Theta Gantry with Planar Air Bearing

Travel range ；150mm Repeatability in both directions ；±1µm Accuracy (error mapping) ；±2µm maximum speed ；250mm/sec acceleration ；5μm Straightness ；±10μm resolution ；0.1μm

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Marble Motion Positioning Stages

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Product Details
Application Cases
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Ultra-Precision · Frictionless Planar Motion · Multi-Axis Integration
Ⅰ. Product Overview
The XYZ Theta Gantry with Planar Air Bearing from W-Robot is a next-generation ultra-precision motion platform that integrates three translational axes (X/Y/Z) and a rotational Theta axis on a planar air bearing base. This structure enables non-contact, frictionless movement with nanometer-level smoothness and sub-micron positioning accuracy.
By combining planar air bearing technology and direct drive linear & rotary motors, this gantry achieves multi-axis synchronized motion with zero mechanical backlash, superior dynamic response, and exceptional long-term stability — ideal for applications demanding the highest precision, such as semiconductor wafer processing, optical inspection, and precision metrology systems.
Ⅱ. Technical Features
Planar Air Bearing Platform: Provides frictionless, contact-free motion with no mechanical wear.
Integrated XYZ + Theta Axes: Enables simultaneous multi-degree motion for complex positioning.
Direct Drive Technology: Linear and rotary direct drive motors ensure high torque and ultra-fast response.
Sub-Micron Accuracy: Achieves nanometer-level smoothness and sub-micron repeatability.
High Rigidity Structure: Granite or aluminum base ensures flatness and vibration isolation.
Cleanroom Compatible: Non-particle generation, perfectly suited for semiconductor and optics environments.
Customizable Stroke & Payload: XY travel up to 1000×1000 mm, Z-stroke and rotation configurable.
Ⅲ. Application Fields
Semiconductor wafer alignment & lithography
Optical metrology and surface inspection
Laser scanning and micro-machining systems
Flat panel display (FPD) manufacturing
Micro-assembly and packaging lines
High-end laboratory automation and nanotechnology research
Ⅳ. Model Selection & Customization
W-Robot supports extensive customization for the XYZ Theta Air Bearing Gantry, including:
Planar size: 300×300 mm up to 1000×1000 mm
Z-axis stroke: from 50 mm to 300 mm (customizable)
Theta rotation range: 360° continuous or limited angle
Feedback systems: interferometer, optical encoder, or laser scale
Material: granite base or aluminum alloy for rigidity & weight optimization
Vacuum-compatible & cleanroom configurations available
Complete 2D/3D CAD models and documentation upon request
Ⅴ. Product Advantages
True 4-DOF (X/Y/Z/Θ) integrated design
Non-contact motion → zero wear, zero friction
Ultra-high positioning accuracy and repeatability
Smooth, vibration-free operation
Maintenance-free air bearing system
Modular & scalable for automation and precision assembly lines
Ⅵ. Installation & Maintenance
Maintain clean and dry compressed air (filtration ≥0.01 μm)
Ensure granite base or mounting surface is flat and vibration-isolated
Avoid sudden load or external shock on the moving platform
Regularly check air supply pressure and filtration status
Keep encoder and motor area clean and dust-free
Follow W-Robot’s recommended calibration cycle (every 12 months)
Ⅶ. Learn More
Explore more with W-Robot:
🌐 www.w-robot.com
Recommended Reading:
“Planar Air Bearing Technology in Semiconductor Motion Systems”
“How Multi-Axis Gantries Improve Precision Manufacturing”
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Electric Gripper – LEF40-S30

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Listed below are answers to our most commonly asked questions. Don't see your question?Contact our customer service team. We would be glad to assist you.

FAQ

Listed below are answers to our most commonly asked questions. Don't see your question?Contact our customer service team. We would be glad to assist you.

What are the future development trends of linear modules and linear motors?

In the future, linear modules and linear motors will develop towards higher precision, higher speed, smaller size, intelligence, and integration with other advanced technologies (such as artificial intelligence and the Internet of Things).

What parameters need to be provided for customized linear motors?

It is necessary to provide detailed parameters such as load weight, stroke, speed, acceleration, accuracy requirements, installation method, and operating environment so that the manufacturer can design and manufacture a linear motor that meets the requirements.

How long is the customization cycle of linear modules?

The customization cycle depends on the complexity of the customization and the manufacturer's production capacity, generally about 1-4 weeks. The specific time can be determined by communicating with the manufacturer.

Can linear motors be upgraded?

The performance of linear motors can be improved by upgrading them with high-performance drives, optimizing control system parameters, and improving heat dissipation structures.

Is it easy to upgrade the linear module?

It is relatively easy to upgrade the motor, control system, guide rail and other components of the linear module according to actual needs to improve its performance and accuracy.

What is the after-sales maintenance service of linear motors?

Regular manufacturers usually provide comprehensive after-sales maintenance services, including fault diagnosis, maintenance guidance, parts replacement, etc., but the response speed and quality of after-sales maintenance services may vary from manufacturer to manufacturer.

What is the warranty period for linear modules?

The warranty period of linear modules from different manufacturers varies, generally around 1-2 years. The specific warranty period can be confirmed with the manufacturer at the time of purchase.

What should we pay attention to when integrating linear motors with other equipment?

Attention should be paid to issues such as interface compatibility, signal matching, control logic coordination, and installation space and layout between devices to ensure that the devices can work together.

Can the linear module be integrated with other equipment?

Absolutely. Linear modules can be integrated with other devices such as robots, sensors, and vision systems to build more complex and intelligent automated production lines.

What kind of control system do linear motors require?

Linear motors typically require a high-performance motion control system that can achieve precise position control, speed control, and thrust control, such as a dedicated linear motor drive with a motion control card or a high-end PLC.

Products

XYZ Theta Gantry with Planar Air Bearing

Ⅰ. Product Overview

Ⅱ. Technical Features

Ⅲ. Application Fields

Ⅳ. Model Selection & Customization

Ⅴ. Product Advantages

Ⅵ. Installation & Maintenance

Ⅶ. Learn More

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