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Marble Motion Positioning Stages

PABG1000 – Air Floating XY Stage

journey ；400mm Straightness ；±1µm/full stroke Flatness ；±2µm/full stroke Yaw angle ；+2arc-sec pitch angle ；+2arc-sec Error mapping accuracy ；±1μm Repeatability in both directions ；0.5µm

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XYZ Theta Gantry with Planar Air Bearing

Travel range ；150mm Repeatability in both directions ；±1µm Accuracy (error mapping) ；±2µm maximum speed ；250mm/sec acceleration ；5μm Straightness ；±10μm resolution ；0.1μm

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PFG1000 (Dual Drive Gantry + Z Axis)

Limit sensor limit travel ；420mm Flatness (perpendicular straightness) ；±5µm/full stroke Flatness (horizontal straightness) ；±5µm/full stroke Yaw angle ；+5arc-sec pitch angle ；+5arc-sec Accuracy (after error mapping) ；+5arc-sec

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PFG2000 (Single Axis Gantry Stage)

journey ；600mm Straightness ；±5µm/full stroke Flatness ；±5µm/full stroke Error mapping accuracy ；±1.5µm Repeatability in both directions ；±0.5µm X/Y orthogonality ；+2arc-sec speed ；1000mm/sec

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PFG4000 ( Hollow Single Axis Gantry Stage )

journey ；850mm Straightness ；±5µm/full stroke Flatness ；±5µm/full stroke Error mapping accuracy ；+1µm Repeatability in both directions ；±1µm X/Y orthogonality ；+5μm speed ；1500mm/sec

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PTG1000 ( Single Axis Gantry Stage + Z Axis)

journey ；510mm Straightness ；+5μm Flatness ；+5μm Yaw angle (motor side/center) ；+8arc-sec Pitch angle (motor side/center) ；+8arc-sec speed ；1000mm/sec

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PTG2000 ( Single Axis Gantry Stage )

journey ；510mm Straightness ；±10µm/full stroke Flatness ；±10µm/full stroke Error mapping accuracy ；+2µm Repeatability in both directions ；±0.5µm X/Y orthogonality ；+5μm speed ；1000mm/sec maximum acceleration ；5m/s²(0.5G)

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PTG3000 ( Single Axis Gantry Stage )

maximum acceleration ；5m/s² maximum speed ；1m/s After moving 30mm, it stabilizes within ±10µm, with an effective load of 10kg ；230ms After moving 30mm, it stabilizes within ±2µm, with an effective load of 10kg. ；280ms Straightness ；±10μm Sigma repeatability ；8 pm Accuracy ；+40μm

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Fixed Beam XY Stage

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Fixed Beam Stage (Double X-Axis)

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Dual Station XY-Theta Stage

Structural design: Dual-station configuration, supporting multi-task parallel processing Motion control: integrates XY high-precision positioning and Theta rotary axis Compact design: suitable for applications with limited space. Performance advantages: Uninterrupted process for each axis, ensuring continuous production.

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